AccuThermo AW 610M Rapid Thermal Annealing Equipment

Type: The most popular , production proven model of Desktop, Atmospheric, Manual Load/Unload RTP RTA RTO RTN.  Q and A on RTP equipment.

New Options: Add Double O Ring and/or O2 Sensor/Analyzer for O2 sensitive applications and saving GaAs, InP, GaN, GaInP, SiC and other valuable compound material wafers .

Wafer Size: 2 to 4 inch or 3~6 inch, Silicon wafers. Use 3″/4″/6″ Susceptor or wafer carriers for small samples, compound material (GaAs , InP , GaN , SiC , GaInP , Glass , etc.) wafers and wafers with metal thin film on top during RTP process.

Controller: Allwin21 unique real time precise Advanced PID Control Technology with Fuzzy Logic Learn capability and Chamber Thermal Data. 0.1millisecond Control!

Temperature: Closed-loop temperature control with bare thin 0.010” Dia K type thermocouple (150-840C) and Non-Contact Patented ERP pyrometer (Option,400-1250C) . 0-0.25 second quick response for repeatability and precise control! Typical processes are 400-600C for alloy, 700-950C for titanide, compound materials annealing and 1000-1050C for implant annealing

Lamp Zones: 6 Zones. Bottom and top heating with 21 (1.2KW ea)  Radiation heating lamps. 2400hours-power-on service time! SSR Lamp control instead of  traditional TRIAC control.

Gas Lines: MFCs, 6 lines capability .Typically, Nitrogen (N2), oxygen (O2), argon (Ar), helium (He) , Forming Gases, NH3, N2O2 etc. are used.

Chamber Design: 40-years-proven Heating chamber’s cold-wall design with special scattering gold plating finish ,originated from AG Associates Heatpulse 610.

Installation: Customer-installation design. Local engineer installation is optional.

PowerSum Function: Save valuable compound material wafers.

Please fill in the RFQs ( RTP )at our website for Fast Free Quotes. Appreciate your time.

1. Allwin21 Brochures: Rapid Thermal Processors
2. PPT on Why AccuThermo AW 610M RTP
3. PPT on Why AccuThermo AW820M RTP
4. PPT on Why do not buy RTP with vacuum function
5. Video on Why AccuThermo AW610M RTP
6. Video on Why AccuThermo AW820M RTP
7. Video on AccuThermo AW610
8. Video on why do not buy RTP with vacuum function

For many years AG Associates was the dominant manufacturer of RTP systems. It was founded in 1981 and produced the first single wafer RTP system in 1982, the Heatpulse 210. In 1987, it produced the Heatpulse 610. These RTP systems run at atmospheric pressure and rely on a pre-process nitrogen or argon purge prior to wafer processing. They are still being used around the world in manufacturing, R&D and Universities. These RTP systems have a proven track record for reliability and simplicity.

 

Allwin21 Corp. is the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Processing equipment. Allwin21 is manufacturing the new AccuThermo AW Series Atmospheric Rapid Thermal Processors and Vacuum Rapid Thermo Processors.Compared with traditional RTP systems, Allwin21″s AccuThermo AW RTPs have innovative software and more advanced temperature control technologies to achieve the best rapid thermal processing performance ( repeatability , uniformity and Stability etc.).

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